Thermal Mass Flowcontrollers

files/img/hardware/sfc-5000.jpgSensirion's mass flow controller SFC5000 offers fast response times and accurate control of gas flows over a very wide range. Based on CMOSens® Technology, the digitally calibrated and temperature compensated sensor signal is processed and used to accurately set the position of the proportional control valve. Thanks to this principle, the mass flow controller is not susceptible to electromagnetic interference. The SFC5000 offers both Digital and analog interfaces and provides stable and precise control of gas flows. Required power supply is unipolar 14 to 24 Vdc.


Measuring Principle: Thermal Mass, CMOS Sensor
Sizes: ¼“ and ½“ Female G
Flow ranges: up to 100 nl/min
Accuracy: 0.08% to 0.1% FS,
0.8% to 1% OR
Calibration Gases: Air, O2, N2, Ar, CO2, N2O, Others upon request